S. Zhgoon et al., Surface acoustic wave reflection from diamond-like carbon thin film reflecting arrays on LiNbO3 substrates, IEEE ULTRAS, 48(1), 2001, pp. 202-208
Citations number
8
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Surface acoustic wave (SAW) reflection from diamond-like carbon (DLC) strip
reflecting arrays on Y-Z LiNbO3 is investigated. The reflection from DLC s
trips with triangular cross section has been observed. Reflection increases
in alternating DLC and Al strips in 90 degrees reflecting arrays in compar
ison with pure Al structures. The values of reflection coefficient per peri
od in the slanted reflecting arrays are estimated to be about 1.0% for pure
DLC strips (height to wavelength ratio equal to 0.02), 2% for uniform Al c
oating on DLC reflecting arrays, and 3.5% for alternating DLC and Al strips
. This value is higher than that for pure Al strips by about 0.7%. Reflecti
on properties are briefly discussed, and preparation technique is presented
.