(110) and (103) YBa2Cu3O7 films have been grown onto exact and vicinal (110
) SrTiO3 substrates, and on vicinal (110) MgO substrates with a SrTiO3 buff
er layer. The samples are carefully characterised by reciprocal space mappi
ng with x-ray diffraction, in order to investigate the features of the typi
cal double domain of (110) and (103) YBa2Cu3O7 structure. It is demonstrate
d that vicinal cut substrates allow to select one film/substrate epitaxial
relation. The growth properties of these thin films deposited on vicinal su
rfaces are discussed.