M. Macek et al., A study of plasma parameters in a BAI 730 M triode ion plating system by means of a Langmuir probe and plasma mass and energy spectroscopy, SURF COAT, 135(2-3), 2001, pp. 208-220
The plasma in a physical vapor deposition (PVD) system used for the deposit
ion of hard coatings (TiN, CrN) was studied by means of a Langmuir probe an
d energy resolved spectroscopy (Balzers plasma process monitor PPM 421). I-
V measurements gave the plasma (U-pl) and floating (U-fl) potentials, as we
ll as the electron temperature T-e and plasma density n(i). U-pl deduced fr
om I-V measurements agreed well with the peak of the positive ion energy di
stribution, as well as with the highest positive potential for the given op
erational mode. Energy spectra measured in deposition of TiN show a high de
gree of ionization of Ti, with Ti2+ as the prevalent ion. T-e calculated fr
om the Maxwellian distribution for the standard deposition of TiN is rather
high (T-e = 6-8 eV). We believe that the oscillations of the plasma potent
ial with the measured amplitude up to 15 V are most probably the reason. Th
e electron energy distribution F(E) is better described by the Druyvesteyn
distribution one than by a Maxwellian one. (C) 2001 Elsevier Science B.V. A
ll rights reserved.