Thin film analysis via accelerator-based nuclear methods

Authors
Lieb, KP
Citation
Kp. Lieb, Thin film analysis via accelerator-based nuclear methods, THIN SOL FI, 380(1-2), 2000, pp. 269-275
Citations number
51
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
380
Issue
1-2
Year of publication
2000
Pages
269 - 275
Database
ISI
SICI code
0040-6090(200012)380:1-2<269:TFAVAN>2.0.ZU;2-D
Abstract
Methods for depth profiling layered structures in the 10-100 nm range via i on beam analysis, such as Rutherford backscattering spectrometry, channelin g, nuclear reaction analysis and elastic recoil detection analysis, are des cribed in connection with ion-beam synthesized silicides (beta -FeSi2 TaSi2 ) and epitaxial regrowth of amorphous SiO2. Methods using implanted radioac tive marker isotopes in nanometer thin films, such as perturbed angular cor relation spectroscopy, will be sketched. (C) 2000 Elsevier Science B.V. All rights reserved.