Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography

Authors
Yang, H Deschatelets, P Brittain, ST Whitesides, GM
Citation
H. Yang et al., Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography, ADVAN MATER, 13(1), 2001, pp. 54
Citations number
31
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
13
Issue
1
Year of publication
2001
Database
ISI
SICI code
0935-9648(20010105)13:1<54:FOHPCM>2.0.ZU;2-G
Abstract
Ceramic components for microelectromechanical (MEMS) systems, for example t he micrometer-sized gear made from SiBNC shown in the Figure, offer the opp ortunity to extend MEMS technology towards high-temperature and oxidizing-e nvironment applications, such as microturbines and high-temperature sensors and actuators. Preceramic polymers are used in conjunction with soft litho graphy and subsequent pyrolysis to produce the high aspect ratio structures .