Perpendicular actuation with individually controlled polymer microactuators

Actuator systems based on conducting polymers, such as polypyrole, with whi ch three-dimensional movement can be controlled, are described. The Figure shows a combination of two such microactuators which are used to "kick" a g lass bead across the surface of a silicon wafer. The microfabrication metho ds used to produce the systems are described and the potential uses, for ex ample microrobotic arms, discussed.