We investigated the growth of QDs on AlGaAs/GaAs(3 1 1)B by atomic hydrogen
assisted molecular beam epitaxy. In the growth of QDs directly on AlGaAs,
the QDs size fluctuation increased with increasing Al composition of the Al
GaAs underlying layer. However, the uniformity of QDs size and the ordering
were improved by introduction of a thin GaAs spacer layer. It was conclude
d that there is a strong interaction between the InGaAs-strained and underl
ying layers. The strong photoluminescence intensity of QDs confined in AlGa
As with GaAs spacer layers was maintained up to room temperature. Hence, th
e carrier collection efficiency into the QDs was improved and the escape of
carriers from the QDs was suppressed by introducing higher potential AlGaA
s barrier layers. (C) 2001 Elsevier Science B.V. All rights reserved.