In situ observation of superstructures on InP(001) surface under hydrogen atmospheric environment with using grazing incidence X-ray diffraction

Because of the difficulties of using electron-based techniques in the metal organic vapor-phase epitaxy (MOVPE) environment, an in situ X-ray diffracto meter that combines a goniometer and reactor chamber was developed. Consequ ent measurements of P-rich InP(001) surface grown by MOVPE show the surface has a (2 x 1) structure. Calculations based on a P-dimer model suggest tha t this structure is composed of P-dimers whose bonding is parallel to the [ (1) over bar 10] direction and indicates indium displacement in the second layer. (C) 2000 Elsevier Science B.V. All rights reserved.