Growth pressure dependence of neighboring mask interference in densely arrayed narrow-stripe selective MOVPE for integrated photonic devices

We have investigated the dependence of neighboring mask interference on gro wth pressure in narrow-stripe selective MOVPE with arrayed stripe masks for the growth of densely-arrayed optical waveguides. Atmospheric-pressure MOV PE is effective in fabricating densely arrayed waveguide without inducing n eighboring mask interference. On the other hand, low-pressure MOVPE has the advantage that the distribution of PL-wavelength over the microarray waveg uide can easily be controlled by utilizing neighboring mask interference. A n appropriate mask pattern and growth conditions for fabricating integrated photonic devices can thus be selected. A mask interference constant was in troduced and used to simulate distributions of PL-wavelengths in arrayed wa veguide. Simulated results matched experimental results well, (C) 2000 Else vier Science B.V. All rights reserved.