The gas-phase chemistry and reactions between trimethyl gallium ((CH3)(3))G
a, TMGa) and ammonia (NH3) were investigated by the use of quantum chemical
calculations employing density functional theory techniques. Reactive inte
rmediates and reaction pathways originating from the initial formation of t
he gas-phase adduct between TMGa and NH3 were identified. The lowest activa
tion Gibbs free energy for the formation of methane For these reactions inv
olving the TMGa:NH, adduct is 34 kcal/mol. In addition, a further reaction
intermediate was identified having the stoichiometry TMGa:(CH3)(2)GaNH2 :NH
3, and this intermediate eliminates methane with a low Gibbs free energy ac
tivation barrier of 20 kcal:mol. Therefore, it appears that the production
of methane from TMGa and NH, may be an autocatalytic process. The implicati
ons for reactor design and growth are discussed. (C) 2000 Elsevier Science
B.V. All rights reserved.