Synthesis and ceramic conversion of polysiloxazane to silicon oxynitride

Amorphous silicon oxynitride powders have been obtained by pyrolysis of pol ysiloxazane in a stream of anhydrous NH3 at the temperature up to 1000 degr eesC. The polysiloxazane is fabricated from ammonolysis of chloropolysiloxa ne that is produced by the hydrolysis of silicon tetrachloride. The convers ion of polysiloxazane to silicon oxynitride and the structural features of the final powders have also been studied by infrared spectra, elemental com position and X-ray diffraction analysis and SEM observation.