Fabrication of a vacuum-sealed magnetic sensor with a Si field emitter tip

Authors
Uemura, K Kanemaru, S Itoh, J
Citation
K. Uemura et al., Fabrication of a vacuum-sealed magnetic sensor with a Si field emitter tip, J MICROM M, 11(1), 2001, pp. 81-83
Citations number
6
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
11
Issue
1
Year of publication
2001
Pages
81 - 83
Database
ISI
SICI code
0960-1317(200101)11:1<81:FOAVMS>2.0.ZU;2-1
Abstract
A vacuum-sealed magnetic sensor was fabricated. The sensor consists of a co ne-shaped silicon field emitter tip mounted on a TO-5 IC header and bonded to a glass package with epoxy resin. This sensor detects the displacement o f an electron beam in the anode caused by the Lorentz force deflection effe ct, and thus measures the magnetic flux strength. The estimated sensitivity of the sensor was as high as 7 x 10(3)% T-1 below 10 mT.