Preparation and optical characterization of sol-gel deposited Pb(Zr0.45Ti0.55)O-3 films

Homogeneous crack-free lead zirconate titanate (Pb(Zr0.45Ti0.55)O-3: PZT 45 /55) films were prepared by a chemically modified sol-gel process using lea d acetate trihydrate, zirconium n-propoxide, and titanium isopropoxide prec ursors. The coating solutions were modified by the addition of diethanolami ne. Single and multilayer films were deposited with a 2000 rpm spin rate on fused silica and MgO(100) substrates. Multiple spin coating with an interm ediate heat treatment in air at 400 degreesC for 3 min between coatings was performed to obtain films up to 2 mum in thickness. The formation of the t etragonal perovskite structure was found to depend on the intermediate firi ng temperature, final annealing temperature, and annealing time. A 650 degr eesC rapid thermal annealing treatment in oxygen was required to crystalliz e the PZT film into the perovskite structure. The films were characterized using optical spectroscopy, X-ray diffraction (XRD), scanning electron micr oscopy (SEM), X-ray photoelectron spectroscopy (XPS), and thermo-gravimetry and differential scanning calorimetry (TG-DSC). The optical constants of t he PZT films were evaluated from spectral transmittance and reflectance mea surements. Optical constants are presented over the visible and near infrar ed region.