The use of sol-gel to fabricate silica-on-silicon waveguides, and particula
rly erbium-doped waveguide amplifiers, is reviewed. In particular, efforts
to use sol-gel to improve molecular homogeneity in heavily Er-doped silica-
based films is discussed. A variety of material studies carried out to inve
stigate the gain limitations found in these materials is then presented. Th
ese include x-ray diffraction, ellipsometry and Rutherford backscattering.
Excess heat treatment is used to force crystallisation of the films, and an
alysis of the resulting structure is used to infer properties of the glass
before the additional heating. The use of erbium alkoxide precursors is sho
wn to alter the erbium environment in the final glass, in comparison to the
use of inorganic erbium salts.