Ultraviolet-laser-induced crystallization of sol-gel derived inorganic oxide films

Structural changes stimulated by ultraviolet (UV) laser irradiations of sol -gel derived inorganic oxide films were investigated. Dried gel films of Ti O2, Nb2O5, Ta2O5, SrTiO3 and Pb(ZrxTi1-x)O-3 (PZT) were found to be crystal lized by the laser irradiation. On the other hand, the photo-induced change in gel films of BaTiO3, LiNbO3 and LiTaO3 was not observed although the la ser beams were absorbed in the films. These sol-gel films were thermally cr ystallized at almost the same temperature around 600-700 degreesC except Ti O2. Thus, the UV-laser-induced crystallization is not directly ascribed to a simple thermal effect with the irradiation. Photochemical properties of t he cations are assumed to be important for the change in sol-gel films.