Technology and realization of metallic curved waveguide mirrors in polymerfilm waveguides based on anisotropic plasma etching

Curved waveguide mirrors acting in the same way as cylindrical lenses are f abricated in a polymer film waveguide. The waveguide material used is Cyclo tene 3022(TM) (bisbenzocyclobutene) developed by the Dow Chemical Company. The waveguide mirror structure is dry etched into the film waveguide employ ing electron cyclotron resonance reactive ion etching. To enhance their ref lectivity the vertical dry-etched sidewalls are metallized. Curved polymer film waveguide mirrors showing a reflectivity of 75% are realized. (C) 2001 American Vacuum Society. [DOI: 10.1116/1.1335839].