A solid-state near infrared spectrum analyzer based on polycrystalline Ge on Si

Citation
L. Colace et al., A solid-state near infrared spectrum analyzer based on polycrystalline Ge on Si, MAT SC S PR, 3(5-6), 2000, pp. 545-549
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
ISSN journal
13698001 → ACNP
Volume
3
Issue
5-6
Year of publication
2000
Pages
545 - 549
Database
ISI
SICI code
1369-8001(200010/12)3:5-6<545:ASNISA>2.0.ZU;2-Q
Abstract
We report on a novel solid-state spectrum analyzer in the near infrared. Th e device is an array of six photodetectors based on polycrystalline germani um film evaporated on a silicon substrate and each element is a wavelength- selective detector. We describe the fabrication and characterization of suc h device and we demonstrate its capability both as a wavelengthmeter for qu asi-monochromatic light beams and as a spectrum analyzer. (C) 2001 Elsevier Science Ltd. All rights reserved.