In the present work, planar waveguides in Y-cut LiNbO3 were obtained using
modified proton exchange (PE) conditions of: PE and subsequent annealing (A
PE), PE in buffered melts (BMPE), APE followed by PE (APE + PE), and PE in
vapours (VPE). Benzoic acid was used as the proton source in the PE, BMPE,
and (APE + PE) experiments. Cinnamic acid was used for obtaining VPE-wavega
ides. The main aim was to prevent surface damage of Y-cut crystals due to t
he strains introduced by proton exchange. The investigations performed show
ed that the surface etching is probably due to lattice deformation anisotro
py leading to higher strains in PE Y-cut samples. Most encouraging results
were observed, when an optimized (APE+PE)-procedure was used for waveguide
formation. This method is very attractive for the fast preparation of deep
high-index and low-loss waveguides in Y-cut LiNbO3. This procedure allows p
assive and active elements to be produced in one and the same Y-cut substra
te of LiNbO3. Similar preliminary results were obtained under VPE condition
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