Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation

High performance silicon-based, micro-optical switches are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silic on with KOH. The resulting structure was assembled with a 100 mum-thick Per malloy piece and then, it was associated to a small magnetic circuit for it s electromagnetic actuation. In order to avoid power consumption while hord ing ON and OFF states, a bi-stable operation principle is proposed. The bi- stable behavior is obtained by using a stable mechanical position due to th e cantilever stiffness and a second magnetic stable position due to a perma nent magnet. Switching operation is provided by electrical currents in wind ings. The aim of this paper is to present a study on modeling and optimizat ion of this system by means of Finite Element Modelling (FEM) simulations, using ANSYS software. iterative magnetomechanical simulations are performed . Optimization of dimensions and material properties is presented. (C) 2001 Elsevier Science B.V. All rights reserved.