A kinematic analysis of cylindrical ultrasonic micromotors

The present work deals with a theoretical analysis of operating principle o f cylindrical ultrasonic micromotors. Although the movement has been realis ed by experiments and measurements, a fairly deep-going mathematical descri ption on the motion has not been seen in literature. The work carried out i n this paper is based on simplified beam bending vibration model. The obtai ned expressions provide a theoretical understanding of the motor operation and driving mechanism. The analysis is also valuable for further modelling and simulation of the motors. (C) 2001 Elsevier Science B.V. All rights res erved.