T. Satoh et al., Fabrication of Cu(In,Ga)Se-2 by in-line evaporation (composition monitoring method using heat radiation), SOL EN MAT, 67(1-4), 2001, pp. 203-207
We have proposed a composition-monitoring method using heat radiation for a
n in-line evaporation process. This method utilizes the difference of heat
radiation from Cu- and (In,Ga)-rich films. With this method, we can success
fully control chemical compositions easily and prepare device-quality Cu(In
,Ga)Se, thin films. (C) 2001 Elsevier Science B.V. All rights reserved.