W. Ensinger et al., Inner wall coating of cylinders by plasma immersion ion implantation for corrosion protection, SURF COAT, 136(1-3), 2001, pp. 202-206
Hollow workpieces such as cylinders are often required to exhibit better pe
rformance in wear and corrosion behaviour than the material the workpiece i
s made of can offer. The problem can be overcome when a protective coating
is deposited onto the inner walls. However, coating inner walls by means of
physical vapour deposition techniques is difficult because the material to
be deposited has to enter the hollow object under very flat angles to the
wall, depending on the ratio of aperture to inner diameter. This problem ca
n be overcome when the source of the material to be deposited is located in
side the workpiece. This is possible when sputter coating with ions is perf
ormed. A sputter target is located inside the workpiece. Energetic ions ext
racted from a plasma in which the workpiece is immersed are accelerated tow
ards the workpiece, enter it and impinge onto the sputter target. Thus, mat
erial is sputtered onto the inner wall. At the same time, ions impinge onto
the growing film and lead to ion beam mixing effects. This technique has b
een tested with cylinders made of different materials and with different sp
utter target materials. The deposited films are well adhering and dense and
may act as protective coatings against corrosion. This is shown for corros
ion of iron in acetic acid, pitting corrosion of aluminium in sodium chlori
de solution, and hydrogen embrittlement of tantalum in hydrochloric acid. (
C) 2001 Elsevier Science B.V. All rights reserved.