Reflection anisotropy spectroscopy (RAS) is a nondestructive surface-sensit
ive optical probe capable of operation within a wide range of environments.
RAS has been applied to semiconductor surfaces and has found use as an in
situ, monitor of semiconductor growth. Surface sensitivity has been demonst
rated with the detection of reconstructions, dimer orientations, and adsorp
tion. More recently, RAS has been used to probe the surface optical propert
ies of metals. In this article, some aspects of the RAS technique are descr
ibed, including an analysis of the passage of polarized light through the R
A spectrometer, which results in frequency-dependent terms related to the r
eal and imaginary RA. ii short review of recent applications of RAS is give
n.