Real structure of a microchannel silicon studied by X-ray diffraction

Authors
Astrova, EV Ratnikov, VV Remenyuk, AD Tkachenko, AG Shul'pina, IL
Citation
Ev. Astrova et al., Real structure of a microchannel silicon studied by X-ray diffraction, TECH PHYS L, 27(1), 2001, pp. 41-44
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS LETTERS
ISSN journal
10637850 → ACNP
Volume
27
Issue
1
Year of publication
2001
Pages
41 - 44
Database
ISI
SICI code
1063-7850(2001)27:1<41:RSOAMS>2.0.ZU;2-J
Abstract
The crystal lattice structure of a microchannel silicon and variation of th is structure in the course of thermal oxidation were studied by X-ray diffr action and topography techniques. (C) 2001 MAIK "Nauka/Interperiodica".