Single semicircular response of dielectric properties of diamond films

Diamond films were synthesized by a microwave plasma-enhanced chemical vapo r deposition method using H-2/CH4 gas mixtures. A Fluke PM6306 RCL Meter wa s used to study the dielectric properties of the diamond films deposited. T he dielectric dispersion measurement yielded the real and imaginary parts o f impedance of diamond films in the form of a depressed semicircle in a com plex plane. A Cole-Cole plot was observed at frequencies from 50 Hz to 1 MH z. The result was found to fit the theoretical resistor-capacitor parallel circuit model. The structure and quality of diamond films were analyzed by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. (C) 2001 Elsevier Science B.V. All rights reserved.