Influence of gas pressure and magnetic field upon de magnetron discharge

We have proposed a hybrid model for de magnetron discharge. Simulations of the discharges under different applied voltages are performed using the hyb rid model. We confirm that this hybrid model is able to predict a magnetron discharge under conditions of less than 1 Pa by comparing the results from the simulation with that from the experiment. We also perform simulations of de magnetron discharges under conditions of different gas pressures and different magnitudes of magnetic field. In so doing, we clarify the influen ce of gas pressure and magnetic field upon de magnetron discharge. (C) 2001 Elsevier Science Ltd. All rights reserved.