The quest for hard materials that are able to sustain elevated stresses as
tools or cutting processes has led to the investigation of(Ti,Al)N/Mo multi
layer coatings. These structures have been deposited by dc magnetron sputte
ring on high-speed steel and stainless-steel substrates and designed with m
odulation periods of approximately 13 nm, up to a total thickness of 2.8 mu
m. Experimental X-ray diffraction (XRD) achieved the basics involving struc
tural quality and texture while RES provided the composition. From AFM obse
rvations the waviness of the surface was monitored and it was found that th
e rms roughness values were minimised for a bias voltage of - 120 V. Ultram
icrohardness values of 33 GPa were obtained for the best samples, and their
adhesion to the steel substrates was also studied. Residual stress measure
ments revealed a compressive stress state that prevailed in these structure
s, ranging from - 0.2 to - 1.3 GPa, (C) 2001 Elsevier Science Ltd. All righ
ts reserved.