The properties of carbon-doped GaN epilayers grown by molecular-beam epitax
y have been studied by temperature-dependent resistivity, Hall-effect measu
rements, x-ray diffraction, and by photoluminescence spectroscopy. Carbon d
oping was found to render the GaN layers highly resistive (> 10(8) Omega cm
) and quench the band edge excitonic emissions. Yellow luminescence is stil
l present in carbon-doped GaN layers. The highly resistive state is interpr
eted as being caused by direct compensation by the carbon acceptors and by
the consequently enhanced potential barrier at the subgrain boundaries. Evi
dence of dislocations joining to form potential barriers along the subgrain
boundaries was observed in photoassisted wet etching experiments on electr
ically conducting GaN layers. GaN films grown on insulating carbon-doped ba
se layers are of excellent transport and optical properties. (C) 2001 Ameri
can Institute of Physics.