Direct generation of optical diffractive elements in perfluorocyclobutane (PFCB) polymers by soft lithography

Citation
H. Shah et al., Direct generation of optical diffractive elements in perfluorocyclobutane (PFCB) polymers by soft lithography, IEEE PHOTON, 12(12), 2000, pp. 1650-1652
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN journal
10411135 → ACNP
Volume
12
Issue
12
Year of publication
2000
Pages
1650 - 1652
Database
ISI
SICI code
1041-1135(200012)12:12<1650:DGOODE>2.0.ZU;2-2
Abstract
Optically diffractive line gratings with 0.58-mum feature sizes have been g enerated in 100-mum perfluorocyclobutane (PFCB) polymer films by direct mic romolding using only a silicon master. Strong reflectivities from the green to red portions of the visible spectrum, depending on incident beam angle, were observed with 3 dB bandwidths of approximately 30 nm, This "negative mold-free" technique permits, for the first time to our knowledge, feature reproduction at submicrometer size scales, eliminates several steps from co nventional soft lithographic methods, and marks itself as a practical means for rapidly generating planar photonic structures that operate spectrally in the visible and the near IR telecommunication bands.