H. Shah et al., Direct generation of optical diffractive elements in perfluorocyclobutane (PFCB) polymers by soft lithography, IEEE PHOTON, 12(12), 2000, pp. 1650-1652
Optically diffractive line gratings with 0.58-mum feature sizes have been g
enerated in 100-mum perfluorocyclobutane (PFCB) polymer films by direct mic
romolding using only a silicon master. Strong reflectivities from the green
to red portions of the visible spectrum, depending on incident beam angle,
were observed with 3 dB bandwidths of approximately 30 nm, This "negative
mold-free" technique permits, for the first time to our knowledge, feature
reproduction at submicrometer size scales, eliminates several steps from co
nventional soft lithographic methods, and marks itself as a practical means
for rapidly generating planar photonic structures that operate spectrally
in the visible and the near IR telecommunication bands.