Electrical characteristics of a RF-GD-OES cell

The purpose of this work is to describe, using a self-consistent two dimens ional hybrid fluid-particle model, the electrical characteristics of a disc harge operating ina RF-GD-OES cell. We show that, for typical operating con ditions at 13.56 MHz, the discharge has a capacitive electrical behavior an d that the main current component at the powered electrode is the displacem ent current. These results are not in agreement with previously published c alculations and this point is discussed.