Study of charge control and gate tunneling in a ferroelectric-oxide-silicon field effect transistor: Comparison with a conventional metal-oxide-silicon structure
Yy. Lin et al., Study of charge control and gate tunneling in a ferroelectric-oxide-silicon field effect transistor: Comparison with a conventional metal-oxide-silicon structure, J APPL PHYS, 89(3), 2001, pp. 1856-1860
It is known that conventional metal-oxide-silicon (MOS) devices will have g
ate tunneling related problems at very thin oxide thicknesses. Various high
-dielectric-constant materials are being examined to suppress the gate curr
ents. In this article we present theoretical results of a charge control an
d gate tunneling model for a ferroelectric-oxide-silicon field effect trans
istor and compare them to results for a conventional MOS device. The potent
ial of high polarization charge to induce inversion without doping and high
dielectric constant to suppress tunneling current is explored. The model i
s based on a self-consistent solution of the quantum problem and includes t
he ferroelectric hysteresis response self-consistently. We show that the po
larization, charge associated with ferroelectrics can allow greater control
lability of the inversion layer charge density. Also the high dielectric co
nstant of ferroelectrics results in greatly suppressed gate current. (C) 20
01 American Institute of Physics.