Study of charge control and gate tunneling in a ferroelectric-oxide-silicon field effect transistor: Comparison with a conventional metal-oxide-silicon structure

Citation
Yy. Lin et al., Study of charge control and gate tunneling in a ferroelectric-oxide-silicon field effect transistor: Comparison with a conventional metal-oxide-silicon structure, J APPL PHYS, 89(3), 2001, pp. 1856-1860
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF APPLIED PHYSICS
ISSN journal
00218979 → ACNP
Volume
89
Issue
3
Year of publication
2001
Pages
1856 - 1860
Database
ISI
SICI code
0021-8979(20010201)89:3<1856:SOCCAG>2.0.ZU;2-S
Abstract
It is known that conventional metal-oxide-silicon (MOS) devices will have g ate tunneling related problems at very thin oxide thicknesses. Various high -dielectric-constant materials are being examined to suppress the gate curr ents. In this article we present theoretical results of a charge control an d gate tunneling model for a ferroelectric-oxide-silicon field effect trans istor and compare them to results for a conventional MOS device. The potent ial of high polarization charge to induce inversion without doping and high dielectric constant to suppress tunneling current is explored. The model i s based on a self-consistent solution of the quantum problem and includes t he ferroelectric hysteresis response self-consistently. We show that the po larization, charge associated with ferroelectrics can allow greater control lability of the inversion layer charge density. Also the high dielectric co nstant of ferroelectrics results in greatly suppressed gate current. (C) 20 01 American Institute of Physics.