Recent developments in fluorine chemistry for microelectronic applications- Some examples at Comurhex

High purity fluorides are very important for microelectronic applications. In this article, we have reviewed how to prepare, handle and analyse such p roducts as WF6 and ClF3, respectively, a tungsten precursor for metal inter connects and an efficient cleaning agent. Material choice and passivation c oupled with high performance analytical studies are the key factors to main tain the highest required purity. This methodology can be extended to other reactive fluorochemicals. (C) 2001 Elsevier Science B.V. All rights reserv ed.