Surface structure and electron density dependence of scattered Ne+ ion fractions from the Si(100)-(2 x 1) surface

The magnitudes and azimuthal anisotropies of 4 keV Ne+ scattered ion fracti ons from the Si(1 0 0)-(2 x 1) two-domain surface have been measured by mea ns of time-of-flight scattering and recoiling spectrometry. The absolute va lues of these ion fractions as well as their dependence on surface structur e and electron density have been determined. By investigating the trajector ies of the scattered Ne+, a clear correlation is demonstrated between these experimentally observed surviving ion fractions of Ne+ and the fraction of ions that scatters From the topmost layer of the surface. This is interpre ted in terms of a model in which the neutralization probability of Ne+ is p roportional to the local substrate electronic charge density, (C) 2001 Else vier Science B.V. All rights reserved.