On line shape analysis in X-ray photoelectron spectroscopy

Any solid state X-ray photoelectron spectrum (XPS) contains contributions d ue to multiple inelastic scattering in the bulk, surface excitations, energ y losses originating from the screening of the final state hole (intrinsic losses), and, for non-monochromatized incident radiation, ghost lines origi nating from the X-ray satellites. In the present paper it is shown how all these contributions can be consecutively removed from an experimental spect rum employing a single general deconvolution procedure. Application of this method is possible whenever the contributions mentioned above are uncorrel ated. It is shown that this is usually true in XPS to a good approximation. The method is illustrated on experimental non-monochromatized MgK alpha sp ectra of Au acquired at different detection angles but for the same angle o f incidence of the X-rays. (C) 2001 Elsevier Science B.V. All rights reserv ed.