Xj. Meng et al., Preparation of highly (100)-oriented metallic LaNiO3 films on Si substrates by a modified metalorganic decomposition technique, APPL SURF S, 171(1-2), 2001, pp. 68-70
LaNiO3 thin films were deposited on Si substrates by a modified metalorgani
c decomposition technique using lanthanum nitrate and nickel acetate as the
start sources. The structures of the films were characterized by X-ray dif
fraction and scanning electron microscope. Highly (1 0 0)-oriented LaNiO3 f
ilms with smooth and crack-free surfaces were obtained using rapid thermal
annealing method. The resistivity versus temperature curves of the textured
LaNiO3 films showed that the films possessed good metallic character. (C)
2001 Elsevier Science B.V. All rights reserved.