High cooling power density SiGe/Si micro-coolers

Authors
Fan, X Zeng, G Croke, E LaBounty, C Ahn, CC Vashaee, D Shakouri, A Bowers, JE
Citation
X. Fan et al., High cooling power density SiGe/Si micro-coolers, ELECTR LETT, 37(2), 2001, pp. 126-127
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
37
Issue
2
Year of publication
2001
Pages
126 - 127
Database
ISI
SICI code
0013-5194(20010118)37:2<126:HCPDSM>2.0.ZU;2-T
Abstract
SiGe/Si superlattice micro-coolers are investigated experimentally. They ca n be monolithically integrated with Si-based microelectronic: devices to ac hieve localised cooling and temperature control. Cooling by as much as 4.2 K at 25 degreesC and 12K at 200 degreesC was measured on 3 mum thick, 60 x 60 mum(2) devices. This corresponds to maximum cooling power densities appr oaching kW/cm(2).