Emerging simulation approaches for micromachined devices

In this survey paper, we describe and contrast three different approaches f or extending circuit simulation to include micromachined devices, The most commonly used method, that of using physical insight to develop parameteriz ed macromodels, is presented first. The issues associated with fitting the parameters to simulation data while incorporating design attribute dependen cies are considered. The numerical model order reduction approach to macrom odeling is presented second, and some of the issues associated with fast so lvers and model reduction are summarized. Lastly, we describe the recently developed circuit-based approach for simulating micromachined devices, and describe the design hierarchy and the use of a catalog of parts.