The effect of substrate orientation on photolumincscence (PL) properties ha
s been explored for GaNAs grown by metalorganic vapor phase cpitaxy using d
imethylhydrazine as a nitrogen precursor. The PL spectra show improvements
in the emission intensity and linewidth, and a decrease in a deep level emi
ssion, with the surface tilled from (100) to (411)A towards (111)A. For the
peak position dependence on excitation intensity, a blueshift revealed by
the increased excitation intensity is also depressed with higher-index subs
trates. These improvements could be obtained as a consequence of reductions
in deep level defects, residual impurity incorporations, and spatial fluct
uations in nitrogen concentration, with an increase in the A-type step dens
ity. In addition to the improved optical quality, (411)A shows a relatively
large redshift in bandgap. Our results indicate that the use of high-index
substrates is effective in GaNAs applications.