THE APPLICATION OF POROUS SILICON INTERFERENCE FILTERS IN OPTICAL SENSORS

Authors
HILBRICH S ARENSFISCHER R KUPPER L THEISS W BERGER MG KRUGER M THONISSEN M
Citation
S. Hilbrich et al., THE APPLICATION OF POROUS SILICON INTERFERENCE FILTERS IN OPTICAL SENSORS, Thin solid films, 297(1-2), 1997, pp. 250-253
Citations number
7
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
297
Issue
1-2
Year of publication
1997
Pages
250 - 253
Database
ISI
SICI code
0040-6090(1997)297:1-2<250:TAOPSI>2.0.ZU;2-Y
Abstract
Optical filters for the infrared to the UV spectral range made of poro us silicon are produced and tuned by modulating the current density du ring the etching process. Using such filters in an optical sensor it i s possible to do quantitative absorption spectroscopy without a spectr ometer, as will be shown. (C) 1997 Elsevier Science S.A.