Comparison of hydrophilic properties of amorphous TiOx films obtained by radio frequency sputtering and plasma-enhanced chemical vapor deposition

The hydrophilic properties of amorphous TiOx films prepared by different me thods, e.g.. radio frequency (rf) sputtering and plasma-enhanced chemical v apor deposition (PECVD), were studied. It was found that the hydrophilicity strongly depends on the film structure. The best hydrophilicity was realiz ed with the PECVD amorphous film having distorted Ti-O bonds due to a large amount of OH groups. These characteristics of the PECVD amorphous film sug gest that such a low-density film including distorted Ti-O bonds could incr ease the photoenhancement efficiency by ultraviolet radiation. This reason is also supported from the results that a low-density rf sputtered film pre sented a higher hydrophilicity compared to a high-density radio frequency s puttered film. Furthermore, both electrical and chemical effects of OH grou ps will also contribute to the good hydrophilicity of the PECVD film.