WO3 thin film sensor prepared by sol-gel technique and its low-temperaturesensing properties to trimethylamine

Tungsten oxide (WO3) thin film has been prepared on a porcelain tube with g old comb-type electrodes by using a sol-gel technique with WCl6 as precurso r. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 50 0 degreesC. The sensing characteristics of the thin film sensor to trimethy lamine were measured. A low-temperature, high sensitivity, excellent select ivity, quick response and recover of thin film sensors to trimethylamine we re found. (C) 2001 Elsevier Science B.V. All rights reserved.