S. Hardikar et al., An investigation into the mechanisms limiting the safe operating area of aLIGBT in DI and DELDI technologies, MICROELEC J, 32(2), 2001, pp. 121-126
The Forward Bias Safe Operating Areas (FBSOA) of 500 V LIGBTs in the Dielec
tric Isolation (DI) and the Double Epitaxial Layer Dielectric Isolation (DE
LDI) technologies are investigated by detailed numerical calculations. The
FBSOA of a DELDI LIGBT is found to be wider than its DI counterpart. The fa
ctors limiting the sustaining voltage in the on-state have been identified.
A shallow floating P-layer incorporated under the gate extension results i
n a significant improvement of the SOA in both the technologies. (C) 2001 E
lsevier Science Ltd. All rights reserved.