Diffractive optical element-based profilometer for surface inspection

Authors
Spagnolo, GS Ambrosini, D
Citation
Gs. Spagnolo et D. Ambrosini, Diffractive optical element-based profilometer for surface inspection, OPT ENG, 40(1), 2001, pp. 44-52
Citations number
36
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICAL ENGINEERING
ISSN journal
00913286 → ACNP
Volume
40
Issue
1
Year of publication
2001
Pages
44 - 52
Database
ISI
SICI code
0091-3286(200101)40:1<44:DOEPFS>2.0.ZU;2-T
Abstract
We introduce a new 3-D sensor based on a diffractive optical element (DOE). Structured light is obtained by the interference of two beams. The design of the projection unit has the following features: the system is very simpl e, small and cheap and the fringe spacing is easily adjustable. Fringes gen erated by the DOE interferometer are analyzed by Fast Fourier Transform (FF T) method, which produced a 3-D perspective plot. The technique and the exp erimental results of real surface profiles are given, (C) 2001 society of P hoto Optical Instrumentation Engineers.