The combinatorial optimization simulated annealing algorithm is applie
d to the analysis of Rutherford backscattering data. The analysis is f
ully automatic, i.e., it does not require time-consuming human interve
ntion. The algorithm is tested on a complex iron-cobalt silicide spect
rum, and all the relevant features are successfully determined. The to
tal analysis time using a PC 486 processor running at 100 MHz is compa
rable to the data collection time, which opens the way for on-line aut
omatic analysis. (C) 1997 American Institute of Physics.