Effects of ambient pressure on silicon nanowire growth

Growth of silicon nanowires (SiNWs) by thermal evaporation of SiO in a clos ed system was studied. The yield of SiNWs obtained in the present closed sy stem was much higher than that from the previous open systems. As the ambie nt pressure increased, the yield of SiNWs decreased and the diameter of the SiNWs increased, but the surface of the SiNWs was roughened. Transmission electron microscopic examination showed that the originally smooth surface of SiNWs was roughened by the formation of Si nano-particles. The implicati on of these results on the growth mechanism of the SiNWs is discussed. (C) 2001 Elsevier Science B.V. All rights reserved.