Time-resolved in-situ spectroscopic monitoring of the CVD of tin oxide onto a glass substrate

Near-infrared diode laser absorption spectroscopy has been demonstrated as an in-situ, non-invasive probe for use with a CVD reactor. The technique ha s been applied to the CVD of tin oxide onto a glass substrate, and by monit oring the evolution of methane in the reactor, it has been shown that the c oncentration of methane is correlated with the deposition rate of the tin o xide film. This illustrates the powerful possibilities for monitoring thin film production and properties, in-situ, during deposition.