Citation
Hz. Wei et al., Silicon-on-insulator based 2 x 2 multimode interference coupler with largetolerance, CHIN PHYS L, 18(2), 2001, pp. 245-247
Citations number
7
Categorie Soggetti
Physics
Journal title
CHINESE PHYSICS LETTERS
ISSN journal
0256307X
→ ACNP
Volume
18
Issue
2
Year of publication
2001
Pages
245 - 247
Database
ISI
SICI code
0256-307X(200102)18:2<245:SB2X2M>2.0.ZU;2-X
Abstract
We demonstrate a type of 2 x 2 multimode interference 3 dB coupler based on
silicon-on-insulator. The fabrication tolerance was investigated by the ef
fective index method and the guide mode method. The devices with different
lengths were fabricated and near-held output images were obtained. Toleranc
es to width, length and etch depth are 2, 200 and 2 mum, respectively. The
devices show a uniform power distribution.