The sensor and actuator properties of piezoelectric materials make them wel
l suited for applications in a variety of microelectromechanical systems (M
EMS). Simulating the response of piezoelectric devices requires solving cou
pled electrical and mechanical partial differential equations. In this pape
r, we have implemented a meshless point collocation method (PCM) to solve t
he governing equations. Interpolation functions are constructed from a repr
oducing kernel approximation, and the governing equations are discretized u
sing a collocation approach. PCM is implemented using either a relaxation a
lgorithm or a fully-coupled algorithm. Comparisons between the two algorith
ms are given. To demonstrate the performance of PCM, the behavior of two st
atic singlelayer problems and a piezoelectric bimorph have been modeled. Th
e bimorph analysis is extended to model a prototype MEMS device.