Optimization of dipole off-axis illumination by 1st-order efficiency method for sub-120 nm node with KrF lithography

Authors
Kim, SM Kim, SJ Bang, CJ Ham, YM Baik, KH
Citation
Sm. Kim et al., Optimization of dipole off-axis illumination by 1st-order efficiency method for sub-120 nm node with KrF lithography, JPN J A P 1, 39(12B), 2000, pp. 6777-6780
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
39
Issue
12B
Year of publication
2000
Pages
6777 - 6780
Database
ISI
SICI code