Development of the concept of adaptive microstructures

Authors
Ignat'ev, MB Luchinin, VV Tomilin, MG
Citation
Mb. Ignat'Ev et al., Development of the concept of adaptive microstructures, J OPT TECH, 68(1), 2001, pp. 69-76
Citations number
12
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF OPTICAL TECHNOLOGY
ISSN journal
10709762 → ACNP
Volume
68
Issue
1
Year of publication
2001
Pages
69 - 76
Database
ISI
SICI code
1070-9762(200101)68:1<69:DOTCOA>2.0.ZU;2-L
Abstract
This paper analyzes the new scientific-technical specialization of adaptive microstructures, which is a synthesis of micromechanics, microelectronics, and microoptics. The bases of microstructures are considered: adaptive mat erials, technologies, and adaptive structures. The status of work in the ar ea of microsystem engineering in Russia is discussed. (C) 2001 The Optical Society of America.